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Cryopump
Contact Us for more details and quote!

Cryogenics Pump Service & Repair

Allied Integral has a decade of experience and knowledge of repair / service cryopump, which can fully refurbish the CTI cryopumps locally and provide technical support / advice for the cryopump related matter, on-site troubleshooting, retrofit and etc.

Cryopump rebuild / support include:
  • Repair / refurbishment of cryopump and compressor.
  • On-site compressor’s absorber replacement.
  • Retrofitting of CT series cryopump.
  • Technical advice of cryopump and health check.
  • On-board module repair.

Cryo compressor rebuild / support cludes:
  • Replacement of valve plate, valves and adsorber.
  • Helium decontamination.
  • Leak check.
  • Retrofitting of cryo compressor.

Brands: 
CTI / Anelva / Ulvac
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