Cryo Pump

Cryogenics Pump Service & Repair

Allied Integral has a decade of experience and knowledge of repair / service cryopump, which can fully refurbish the CTI cryopumps locally and provide technical support / advice for the cryopump related matter, on-site troubleshooting, retrofit and etc.

Cryopump rebuild / support include:

Repair / refurbishment of cryopump and compressor.
On-site compressor’s absorber replacement.
Retrofitting of CT series cryopump.
Technical advice of cryopump and health check.
On-board module repair.

Cryo compressor rebuild / support cludes:

Replacement of valve plate, valves and adsorber.
Helium decontamination.
Leak check.
Retrofitting of cryo compressor.

Brands:
CTI / Anelva / Ulvac