Vacuum Pumps Repair kit

We provide most of the vacuum replacement parts and consumables at competitive price. 

our selection includes repair kits, filters, KF fittings, oils, rotors, stators, plates, shafts, and more for everything from minor pump repair to a complete pump rebuild kit.

Brands:
CTI / Anelva / Ulvac / Ebara / Pfeiffer Adixen / Seiko Seiki / Edwards / Varian / Busch / Alcatel / Agilent 

Spare Parts & Consumables 

Implant Module
  • Axcelis (Eaton) NV10/20 Series / GSD Series 
  • Varian E220/500 Series / 10/XP Series / E1000 Series 
  • Varian VIISion Series / 80 Series / VIISta 810 Series

PVD / CVD / Etch Module
  • AMAT Endura 5500 Series / Producer Series / RTP Series
  • AMAT Centura Series / P5000 Series
  • Novellus Series
  • LAM 9400, 9600 Series / Rainbow Series
  • Mattson Aspen / Strip Series


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